Rockwell’s automatic control system has revolutionized the production of semiconductors – increasing the throughput of wafer processing by 25%, reducing the growth time of wafer from more than one year to six weeks, reducing 85%, and making the whole system more flexible and reliable. Background Information In the semiconductor industry, automation systems are used for wafer to chip processing. In this process, rapid thermal treatment, rapid thermal annealing and rapid thermochemical vapor deposition (RTCVD) are used to etch the surface of silicon wafer. The whole system, called cluster tool, consists of multiple processes, forming an automatic port with three process modules and a cooling chamber. The process module includes all kinds of automation equipment required for advanced semiconductor wafer processing. Traditionally, OEMs in the semiconductor industry use their own hardware and software component systems to control with C or other code programs. Developers of cluster tools found that working with complex programming languages increased development time and training needs, while computers often crashed and were difficult to adjust. In addition, the semiconductor industry needs a standard excuse to use multiple RS232 communication ports in system development. These complex requirements make the rapid and convenient development of the system face certain challenges. The problem was raised. A special developer of semiconductor cluster tools – also a supplier of IBM, Intel, Motorola, Toshiba and other companies – felt that the traditional method of controlling the wafer processing system had great room for improvement, which triggered the research of new technologies beyond traditional semiconductor technology. It can manage and control the production process, control the special functions of each different module, and control the three-axis movement of each module. In addition, it needs a convenient and reliable interface for operators to input and feedback data.

In order not to waste high cost purification space, the whole system must be compact, easy to install and configure. From the initial development of the processing system to the components of the whole system, most wafer processing companies need 12 to 14 months – this part of time must be reduced.

Allen-Bradley’s programmable controller can provide the speed, flexibility, reliability and convenience required for the development and operation of the control system.